Guide.trln

{
"formats": [
{
"childTypeLimit": [
"G_Image",
"G_Note",
"G_Page"
],
"childtype": "G_Page",
"fields": [
{
"fieldname": "Name",
"fieldtype": "OneLineText"
}
],
"formathtml": true,
"formatname": "C_Journal",
"icon": "book_3",
"outputlines": [
""
],
"titleline": "{*Name*}"
},
{
"childTypeLimit": [
"C_Journal",
"G_Page"
],
"childtype": "C_Journal",
"fields": [
{
"fieldname": "Element_Data",
"fieldtype": "Text"
}
],
"formathtml": true,
"formatname": "C_Journals",
"icon": "book_1",
"outputlines": [
""
],
"titleline": "{*Element_Data*}"
},
{
"childTypeLimit": [
"G_Note",
"S_Dice",
"S_Wafer"
],
"childtype": "S_Wafer",
"fields": [
{
"fieldname": "Name",
"fieldtype": "OneLineText"
}
],
"formathtml": true,
"formatname": "C_Sample_family",
"icon": "book_2",
"outputlines": [
"<b>{*Name*}</b>",
"<b>{*#Level1*}</b> samples,",
"<b>{*#Level2*}</b> processeses logged"
],
"titleline": "{*Name*}"
},
{
"childtype": "C_Sample_family",
"fields": [
{
"fieldname": "Name",
"fieldtype": "OneLineText"
}
],
"formathtml": true,
"formatname": "C_Samples",
"icon": "book_1",
"outputlines": [
"File: {*!File_Path*}\\{*!File_Name*}",
"File Size: {*!File_Size*} bytes",
"File Modified: {*!File_Mod_Date*} {*!File_Mod_Time*}",
"<b>{*#Level2*} </b> samples in <b>{*#Level1*}</b> families,",
"<b>{*#Level3*}</b> processes logged"
],
"titleline": "{*Name*}"
},
{
"fields": [
{
"fieldname": "BAKMaterial",
"fieldtype": "AutoChoice"
},
{
"fieldname": "BAKThickness",
"fieldtype": "Number",
"format": "#.##",
"suffix": " nm"
},
{
"fieldname": "BAKRate",
"fieldtype": "Number",
"format": "#.##",
"suffix": " nm/s"
}
],
"formathtml": true,
"formatname": "D_BAK640Metal",
"outputlines": [
"Material:{*BAKMaterial*}",
"Thickness:{*BAKThickness*}",
"Rate:{*BAKRate*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*BAKMaterial*} {*BAKThickness*}"
},
{
"fields": [
{
"fieldname": "BAKMaterial",
"fieldtype": "AutoChoice"
},
{
"fieldname": "BAKThickness",
"fieldtype": "Number",
"format": "#.##",
"suffix": " nm"
},
{
"fieldname": "BAKRate",
"fieldtype": "Number",
"format": "#.##",
"suffix": " nm/s"
}
],
"formathtml": true,
"formatname": "D_BAK640Other",
"generic": "D_BAK640Metal",
"icon": "bullet_2",
"outputlines": [
"Material:{*BAKMaterial*}",
"Thickness:{*BAKThickness*}",
"Rate (nm/s):{*BAKRate*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*BAKMaterial*} {*BAKThickness*}"
},
{
"fields": [
{
"fieldname": "BAKMaterial",
"fieldtype": "AutoChoice"
},
{
"fieldname": "BAKThickness",
"fieldtype": "Number",
"format": "#.##",
"suffix": " nm"
},
{
"fieldname": "BAKRate",
"fieldtype": "Number",
"format": "#.##",
"suffix": "nm/s"
}
],
"formathtml": true,
"formatname": "D_BAK640Oxide",
"generic": "D_BAK640Metal",
"icon": "bullet_1",
"outputlines": [
"Material:{*BAKMaterial*}",
"Thickness:{*BAKThickness*}",
"Rate:{*BAKRate*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*BAKMaterial*} {*BAKThickness*}"
},
{
"fields": [
{
"evalhtml": true,
"fieldname": "Material",
"fieldtype": "AutoChoice"
},
{
"fieldname": "CL200_Time",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_CH",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_Ar",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_Power",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_Temp",
"fieldtype": "Number",
"format": "#.##",
"init": "500.0"
},
{
"fieldname": "Cl200_Thickness",
"fieldtype": "Number",
"format": "#.##",
"suffix": " nm"
}
],
"formathtml": true,
"formatname": "D_CL200Metal",
"outputlines": [
"Layer: <b>{*Material*}</b>",
"t (nm): {*CL200_Time*}",
"CH: {*CL200_CH*}",
"Ar: {*CL200_Ar*}",
"P: {*CL200_Power*}",
"T: {*CL200_Temp*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*Material*} {*Cl200_Thickness*}"
},
{
"fields": [
{
"evalhtml": true,
"fieldname": "Material",
"fieldtype": "AutoChoice"
},
{
"fieldname": "CL200_Time",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_CH",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_Ar",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_O2",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_Power",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_Temp",
"fieldtype": "Number",
"format": "#.##",
"init": "500.0"
},
{
"fieldname": "CL200_Freq",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_ReveseV",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_PulseTime",
"fieldtype": "Number",
"format": "#.##"
},
{
"eqn": "{*pulse_on_time*}*{*frequency*}/10",
"fieldname": "CL200_DutyCycle",
"fieldtype": "Math",
"format": "#.##"
}
],
"formathtml": true,
"formatname": "D_CL200PulsedDC",
"icon": "bullet_1",
"outputlines": [
"Layer: <b>{*Material*}</b>",
"t (s): {*CL200_Time*}",
"CH: {*CL200_CH*}",
"Ar: {*CL200_Ar*}",
"O2: {*CL200_O2*}",
"T: {*CL200_Temp*}",
"P: {*CL200_Power*}",
"f (kHz): {*CL200_Freq*}",
"On (us):{*CL200_PulseTime*}",
"D (%): {*CL200_DutyCycle*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*Material*}"
},
{
"fields": [
{
"evalhtml": true,
"fieldname": "Material",
"fieldtype": "AutoChoice"
},
{
"fieldname": "CL200_Time",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_CH",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_Ar",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_O2",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_Power",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "CL200_Temp",
"fieldtype": "Number",
"format": "#.##",
"init": "500"
}
],
"formathtml": true,
"formatname": "D_CL200RF",
"icon": "bullet_1",
"outputlines": [
"Layer: <b>{*Material*}</b>",
"t (s): {*CL200_Time*}",
"CH: {*CL200_CH*}",
"Ar: {*CL200_Ar*}",
"O2:{*CL200_O2*}",
"P: {*CL200_Power*}",
"T: {*CL200_Temp*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*Material*}"
},
{
"fields": [
{
"evalhtml": true,
"fieldname": "GalvanicMaterial",
"fieldtype": "Choice",
"format": "Ni/Cu"
},
{
"fieldname": "GalvanicTime",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "GalvanicTemp",
"fieldtype": "Number",
"format": "#.##",
"init": "500.0"
},
{
"fieldname": "GalvanicCurrent",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "GalvanicVoltage",
"fieldtype": "Number",
"format": "#.##"
}
],
"formathtml": true,
"formatname": "D_Galvanic",
"icon": "bullet_3",
"outputlines": [
"Layer: <b>{*GalvanicMaterial*}</b>",
"t (min): {*GalvanicTime*}",
"I (A): {*GalvanicCurrent*}",
"V (V): {*GalvanicVoltage*}",
"T: {*GalvanicTemp*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*GalvanicMaterial*}"
},
{
"fields": [
{
"fieldname": "Material",
"fieldtype": "AutoChoice"
},
{
"fieldname": "Z400_Ar",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_O2",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_Pressure",
"fieldtype": "Number",
"format": "#.#E-#"
},
{
"fieldname": "Z400_Power",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_DCBias",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_Time",
"fieldtype": "Number",
"format": "#.##"
}
],
"formathtml": true,
"formatname": "D_Z400Metal",
"outputlines": [
"Material:{*Material*}",
"Ar (SCCM):{*Z400_Ar*}",
"Pres. (mbar):{*Z400_Pressure*}",
"P eff. (W): {*Z400_Power*}",
"DC (V): {*Z400_DCBias*}",
"Time (s): {*Z400_Time*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*Material*}"
},
{
"fields": [
{
"fieldname": "Material",
"fieldtype": "AutoChoice"
},
{
"fieldname": "Z400_Ar",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_O2",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_Pressure",
"fieldtype": "Number",
"format": "#.#E-#"
},
{
"fieldname": "Z400_Power",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_DCBias",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_Time",
"fieldtype": "Number",
"format": "#.##"
}
],
"formathtml": true,
"formatname": "D_Z400Other",
"generic": "D_Z400Metal",
"icon": "bullet_2",
"outputlines": [
"Material:{*Material*}",
"Ar (SCCM):{*Z400_Ar*}",
"Pres. (mbar):{*Z400_Pressure*}",
"P eff. (W): {*Z400_Power*}",
"DC (V): {*Z400_DCBias*}",
"Time (s): {*Z400_Time*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*Material*}"
},
{
"fields": [
{
"fieldname": "Material",
"fieldtype": "AutoChoice"
},
{
"fieldname": "Z400_Ar",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_O2",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_Pressure",
"fieldtype": "Number",
"format": "#.#E-#"
},
{
"fieldname": "Z400_Power",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_DCBias",
"fieldtype": "Number",
"format": "#.##"
},
{
"fieldname": "Z400_Time",
"fieldtype": "Number",
"format": "#.##"
}
],
"formathtml": true,
"formatname": "D_Z400Oxide",
"icon": "bullet_1",
"outputlines": [
"Material:{*Material*}",
"Ar (SCCM):{*Z400_Ar*}",
"O2 (SCCM):{*Z400_O2*}",
"Pres. (mbar):{*Z400_Pressure*}",
"P eff. (W): {*Z400_Power*}",
"DC (V): {*Z400_DCBias*}",
"Time (s): {*Z400_Time*}"
],
"spacebetween": false,
"tables": true,
"titleline": "{*Material*}"
},
{
"condition": "Boolean == \"yes\"",
"fields": [
{
"fieldname": "Tag",
"fieldtype": "Text"
},
{
"fieldname": "Boolean",
"fieldtype": "Boolean",
"format": "yes/no"
}
],
"formatname": "G_Boolean",
"icon": "check_2",
"outputlines": [
"{*Tag*}: {*Boolean*}"
],
"titleline": "{*Tag*}"
},
{
"condition": "Boolean == \"no\"",
"fields": [
{
"fieldname": "Tag",
"fieldtype": "OneLineText"
},
{
"fieldname": "Boolean",
"fieldtype": "Boolean",
"format": "yes/no"
}
],
"formatname": "G_Boolean_false",
"generic": "G_Boolean",
"icon": "x_3",
"outputlines": [
"{*Tag*}: {*Boolean*}"
],
"titleline": "{*Tag*}"
},
{
"fields": [
{
"fieldname": "Name",
"fieldtype": "OneLineText"
},
{
"fieldname": "Link",
"fieldtype": "ExternalLink"
}
],
"formatname": "G_File",
"icon": "arrow_5",
"outputlines": [
"{*Link*}"
],
"titleline": "{*Name*}"
},
{
"fields": [
{
"fieldname": "Image",
"fieldtype": "Picture"
},
{
"fieldname": "Caption",
"fieldtype": "Text"
}
],
"formathtml": true,
"formatname": "G_Image",
"icon": "colors",
"outputlines": [
"<i>{*Caption*}:</i>",
"{*Image*}"
],
"titleline": "{*Caption*}"
},
{
"condition": "NoteType == \"Note\"",
"fields": [
{
"fieldname": "NoteText",
"fieldtype": "Text"
},
{
"fieldname": "NoteType",
"fieldtype": "Choice",
"format": "Note/Warning/Success/Failure",
"init": "Note"
}
],
"formathtml": true,
"formatname": "G_Note",
"icon": "note",
"outputlines": [
"{*NoteText*}"
],
"spacebetween": false,
"titleline": "Note"
},
{
"condition": "NoteType == \"Success\"",
"fields": [
{
"fieldname": "NoteText",
"fieldtype": "Text"
},
{
"fieldname": "NoteType",
"fieldtype": "Choice",
"format": "Note/Warning/Success/Failure"
}
],
"formathtml": true,
"formatname": "G_Note_Check",
"generic": "G_Note",
"icon": "check_1",
"outputlines": [
"<p style=\"color:#55AA22\";>{*NoteText*}</p>"
],
"spacebetween": false,
"titleline": "Note"
},
{
"condition": "NoteType == \"Failure\"",
"fields": [
{
"fieldname": "NoteText",
"fieldtype": "Text"
},
{
"fieldname": "NoteType",
"fieldtype": "Choice",
"format": "Note/Warning/Success/Failure"
}
],
"formathtml": true,
"formatname": "G_Note_Cross",
"generic": "G_Note",
"icon": "x_2",
"outputlines": [
"<p style=\"color:#FF0000\";>{*NoteText*}</p>"
],
"spacebetween": false,
"titleline": "Note"
},
{
"condition": "NoteType == \"Warning\"",
"fields": [
{
"fieldname": "NoteText",
"fieldtype": "Text"
},
{
"fieldname": "NoteType",
"fieldtype": "Choice",
"format": "Note/Warning/Success/Failure"
}
],
"formathtml": true,
"formatname": "G_Note_Warning",
"generic": "G_Note",
"icon": "warning",
"outputlines": [
"<p style=\"color:#EE7700\";>{*NoteText*}</p>"
],
"spacebetween": false,
"titleline": "Note"
},
{
"childTypeLimit": [
"G_Image",
"G_Note",
"G_Page"
],
"fields": [
{
"fieldname": "Name",
"fieldtype": "OneLineText"
},
{
"fieldname": "Text",
"fieldtype": "Text",
"lines": 15
}
],
"formathtml": true,
"formatname": "G_Page",
"icon": "doc",
"outputlines": [
"<b>{*Name*}</b>",
"{*Text*}"
],
"titleline": "{*Name*}"
},
{
"fields": [
{
"fieldname": "Tag",
"fieldtype": "OneLineText"
},
{
"fieldname": "Value",
"fieldtype": "Number",
"format": "#.#############"
},
{
"fieldname": "Unit",
"fieldtype": "Text"
}
],
"formatname": "G_Value",
"icon": "sum",
"outputlines": [
"{*Tag*}: {*Value*} {*Unit*}"
],
"titleline": "{*Tag*}: {*Value*} {*Unit*}"
},
{
"fields": [
{
"fieldname": "BakeTemp",
"fieldtype": "Number",
"format": "#.##",
"suffix": "\u00b0C"
},
{
"fieldname": "BakeTime",
"fieldtype": "Number",
"format": "#.##",
"suffix": " s"
}
],
"formathtml": true,
"formatname": "L_Bake",
"icon": "fire",
"outputlines": [
"Bake {*BakeTemp*}, {*BakeTime*}"
],
"spacebetween": false,
"titleline": "Bake {*BakeTemp*} {*BakeTime*}"
},
{
"fields": [
{
"fieldname": "DevelopmentTime",
"fieldtype": "Number",
"format": "#.##",
"suffix": " s"
}
],
"formathtml": true,
"formatname": "L_Development",
"icon": "clock",
"outputlines": [
"Development {*DevelopmentTime*}"
],
"spacebetween": false,
"titleline": "Development {*DevelopmentTime*}"
},
{
"fields": [
{
"fieldname": "Dose",
"fieldtype": "Number",
"format": "#.##",
"suffix": " mJ/cm2"
},
{
"fieldname": "Defoc",
"fieldtype": "Number",
"format": "#.##"
}
],
"formathtml": true,
"formatname": "L_Exposure",
"icon": "bulb",
"outputlines": [
"Exposure {*Dose*}, Defoc {*Defoc*}"
],
"spacebetween": false,
"titleline": "Exposure {*Dose*}"
},
{
"fields": [
{
"fieldname": "Dose",
"fieldtype": "Number",
"format": "#.##"
}
],
"formathtml": true,
"formatname": "L_Flood",
"icon": "bulb",
"outputlines": [
"{*Dose*}mJ/cm2"
],
"spacebetween": false,
"titleline": "Flood Exposure"
},
{
"childTypeLimit": [
"G_Note"
],
"fields": [
{
"fieldname": "SonicationTime",
"fieldtype": "Number",
"format": "#.#",
"suffix": " min"
},
{
"fieldname": "SonicationPower",
"fieldtype": "Number",
"format": "#.##",
"suffix": "%"
},
{
"fieldname": "SonicationTemp",
"fieldtype": "Number",
"format": "#.##",
"suffix": "\u00b0C"
}
],
"formatname": "L_Sonication",
"icon": "music",
"outputlines": [
"Sonication {*SonicationTime*}",
"Power: {*SonicationPower*}",
"Temperature: {*SonicationTemp*}"
],
"spacebetween": false,
"titleline": "Sonication {*SonicationTime*}"
},
{
"fields": [
{
"fieldname": "Polymer",
"fieldtype": "Text"
},
{
"fieldname": "SpinSpeed",
"fieldtype": "Number",
"format": "#",
"suffix": " rpm"
},
{
"fieldname": "SpinAcceleration",
"fieldtype": "Number",
"format": "#",
"suffix": " rpm/s"
},
{
"fieldname": "SpinTime",
"fieldtype": "Number",
"format": "#",
"suffix": " s"
}
],
"formathtml": true,
"formatname": "L_SpinCoating",
"icon": "round_plus",
"outputlines": [
"Spin Coating of {*Polymer*}: {*SpinSpeed*}, {*SpinTime*} (acc. {*SpinAcceleration*})"
],
"spacebetween": false,
"titleline": "Spin Coating {*SpinSpeed*}"
},
{
"childTypeLimit": [
"G_Boolean",
"G_File",
"G_Image",
"G_Note",
"G_Page",
"G_Value"
],
"childtype": "G_Value",
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "MetrologyType",
"fieldtype": "AutoChoice"
}
],
"formathtml": true,
"formatname": "M_Generic",
"icon": "task_2",
"outputlines": [
"<b>{*Date*}</b> {*MetrologyType*}"
],
"titleline": "{*MetrologyType*}"
},
{
"childTypeLimit": [
"G_Boolean",
"G_File",
"G_Note",
"G_Page",
"G_Value"
],
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "MicroscopyType",
"fieldtype": "Choice",
"format": "Optical/Electron",
"init": "Optical"
},
{
"fieldname": "Images",
"fieldtype": "ExternalLink",
"init": "<a href=\"Data/Images\">Images</a>"
}
],
"formathtml": true,
"formatname": "M_Microscopy",
"icon": "mag",
"outputlines": [
"<b>{*Date*}</b>: {*MicroscopyType*} microscopy {*Images*}"
],
"spacebetween": false,
"titleline": "{*MicroscopyType*} microscopy"
},
{
"childTypeLimit": [
"G_Note"
],
"childtype": "G_Note",
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "AnnealingTemperature",
"fieldtype": "Number",
"format": "#.##",
"suffix": "\u00b0C"
},
{
"fieldname": "AnnealingTime",
"fieldtype": "Number",
"format": "#.##",
"suffix": " min"
},
{
"fieldname": "AnnealingType",
"fieldtype": "Choice",
"format": "RTP/Muffle furnace/Oven/Tube furnace/In situ"
},
{
"fieldname": "AnnealingAthmosphere",
"fieldtype": "Choice",
"format": "Vacuum/Air/Oxygen/Nitrogen/"
}
],
"formathtml": true,
"formatname": "P_Annealing",
"icon": "temperature-high",
"outputlines": [
"<b>{*Date*}</b> {*AnnealingType*} treatment at {*AnnealingTemperature*} for {*AnnealingTime*} in {*AnnealingAthmosphere*}"
],
"titleline": "{*AnnealingType*} {*AnnealingTemperature*} {*AnnealingTime*}"
},
{
"childTypeLimit": [
"D_BAK640Metal",
"D_BAK640Other",
"D_BAK640Oxide",
"D_CL200Metal",
"D_CL200PulsedDC",
"D_CL200RF",
"D_Galvanic",
"D_Z400Metal",
"D_Z400Other",
"D_Z400Oxide",
"G_Note",
"L_Bake",
"L_SpinCoating"
],
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "Method",
"fieldtype": "Choice",
"format": "Evaporation/Sputtering/CVD/ALD/Electroplating/Spin Coating"
}
],
"formathtml": true,
"formatname": "P_Deposition",
"icon": "plus",
"outputlines": [
"<b>{*Date*}</b> Deposition by {*Method*}"
],
"spacebetween": false,
"titleline": "{*Method*}"
},
{
"childTypeLimit": [
"G_Note",
"S_Dice"
],
"childtype": "S_Dice",
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "DicingType",
"fieldtype": "Choice",
"format": "Manual/Automatic"
}
],
"formathtml": true,
"formatname": "P_Dicing",
"icon": "table",
"outputlines": [
"<b>{*Date*}</b> {*DicingType*} dicing"
],
"spacebetween": false,
"titleline": "{*DicingType*} dicing"
},
{
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": "%-d/%-m/%y",
"init": "Now"
},
{
"fieldname": "Pressure",
"fieldtype": "Number",
"format": "#.##",
"suffix": " MPa"
}
],
"formathtml": true,
"formatname": "P_HighPressureCleaning",
"icon": "water",
"outputlines": [
"<b>{*Date*}</b> High pressure cleaning at {*Pressure*}"
],
"titleline": "HPC ({*Pressure*})"
},
{
"childTypeLimit": [
"G_Note"
],
"childtype": "G_Note",
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "IBEAngle",
"fieldtype": "Number",
"format": "#",
"suffix": "\u00b0"
},
{
"fieldname": "IBEEnergy",
"fieldtype": "Number",
"format": "#",
"suffix": " V"
},
{
"fieldname": "IBECurrent",
"fieldtype": "Number",
"format": "#",
"suffix": " mA"
},
{
"fieldname": "IBETime",
"fieldtype": "Number",
"format": "#",
"suffix": " min"
}
],
"formathtml": true,
"formatname": "P_IBE",
"icon": "minus",
"outputlines": [
"<b>{*Date*}</b> Ion Beam Etching ({*IBEEnergy*},{*IBECurrent*}) at angle {*IBEAngle*} for {*IBETime*}."
],
"titleline": "Ion Beam Etching"
},
{
"childTypeLimit": [
"G_Note",
"L_Sonication"
],
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "Chemical",
"fieldtype": "Text"
},
{
"fieldname": "LiftOffTemperature",
"fieldtype": "Text",
"suffix": "\u00b0C"
},
{
"fieldname": "LiftOffTime",
"fieldtype": "Text",
"suffix": " min"
}
],
"formathtml": true,
"formatname": "P_LiftOff",
"icon": "round_minus",
"outputlines": [
"<b>{*Date*}</b> Resist removal in {*Chemical*} at {*LiftOffTemperature*} for {*LiftOffTime*}."
],
"spacebetween": false,
"titleline": "Resist removal"
},
{
"childTypeLimit": [
"G_Note",
"L_Bake",
"L_Development",
"L_Exposure",
"L_Flood",
"L_Sonication",
"L_SpinCoating"
],
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "Mask",
"fieldtype": "ExternalLink"
}
],
"formathtml": true,
"formatname": "P_Lithography",
"icon": "pencil",
"outputlines": [
"<b>{*Date*}</b>: Lithography of mask {*Mask*} in {*&Polymer*}"
],
"spacebetween": false,
"titleline": "Lithography"
},
{
"childTypeLimit": [
"G_Note"
],
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "PlasmaPower",
"fieldtype": "Number",
"format": "#.##",
"suffix": " W"
},
{
"fieldname": "PlasmaGas",
"fieldtype": "Choice",
"format": "O2/Ar",
"init": "O2"
},
{
"fieldname": "PlasmaPressure",
"fieldtype": "Number",
"format": "#.##",
"suffix": " mbar"
},
{
"fieldname": "PlasmaTime",
"fieldtype": "Number",
"format": "#.##",
"suffix": " min"
}
],
"formathtml": true,
"formatname": "P_Plasma",
"icon": "sphere",
"outputlines": [
"<b>{*Date*}</b> Plasma {*PlasmaPower*}W, {*PlasmaTime*} min in {*PlasmaPressure*} mbar of {*PlasmaGas*}"
],
"spacebetween": false,
"titleline": "Plasma {*PlasmaGas*} {*PlasmaPower*}"
},
{
"childTypeLimit": [
"G_Note"
],
"childtype": "G_Note",
"fields": [
{
"fieldname": "Date",
"fieldtype": "Date",
"format": " %-d/%-m/%Y",
"init": "Now"
},
{
"fieldname": "Chemical",
"fieldtype": "AutoChoice"
},
{
"fieldname": "WetEtchTemperature",
"fieldtype": "Text",
"suffix": "\u00b0C"
},
{
"fieldname": "WetEtchTime",
"fieldtype": "Text",
"suffix": " min"
}
],
"formathtml": true,
"formatname": "P_WetEtch",
"icon": "minus",
"outputlines": [
"<b>{*Date*}</b> Wet etched in {*Chemical*} at {*WetEtchTemperature*} for {*WetEtchTime*}"
],
"spacebetween": false,
"titleline": "{*Chemical*} Wet Etch"
},
{
"childTypeLimit": [
"G_Note",
"M_Generic",
"M_Microscopy",
"P_Annealing",
"P_Deposition",
"P_Dicing",
"P_HighPressureCleaning",
"P_IBE",
"P_LiftOff",
"P_Lithography",
"P_Plasma",
"P_WetEtch"
],
"fields": [
{
"fieldname": "Name",
"fieldtype": "OneLineText",
"sortkeynum": 1
},
{
"fieldname": "Substrate",
"fieldtype": "AutoChoice"
},
{
"fieldname": "Tag",
"fieldtype": "AutoChoice",
"prefix": "(",
"suffix": ")"
}
],
"formathtml": true,
"formatname": "S_Dice",
"icon": "table",
"outputlines": [
"<b>{*Name*}</b> ({*Substrate*})"
],
"titleline": "{*Name*} {*Tag*}"
},
{
"childTypeLimit": [
"G_Note",
"M_Generic",
"M_Microscopy",
"P_Annealing",
"P_Deposition",
"P_Dicing",
"P_HighPressureCleaning",
"P_IBE",
"P_LiftOff",
"P_Lithography",
"P_Plasma",
"P_WetEtch"
],
"fields": [
{
"fieldname": "Name",
"fieldtype": "OneLineText",
"sortkeynum": 1
},
{
"fieldname": "Lasermark",
"fieldtype": "OneLineText"
},
{
"fieldname": "Substrate",
"fieldtype": "AutoChoice"
},
{
"fieldname": "Tag",
"fieldtype": "AutoChoice",
"prefix": "(",
"suffix": ")"
}
],
"formathtml": true,
"formatname": "S_Wafer",
"icon": "misc",
"outputlines": [
"<b>{*Name*}</b>: Lasermark <b>{*Lasermark*}</b> ({*Substrate*})"
],
"titleline": "{*Name*} {*Tag*}"
}
],
"nodes": [
{
"children": [],
"data": {
"Name": "Page<br />",
"Text": ""
},
"format": "G_Page",
"uid": "04d5ade0b5e311edb62fd319a877bc10"
},
{
"children": [],
"data": {
"Name": "Journals",
"Text": "Journals allow to write down any kind of general text related or unrelated to the samples in the database.<br />A Journal can contain any amount of pages of <u><i>formatted</i></u> text as well as link to other database <a href=\"#b4026def878b11edb00fc7f3b7147ef6\">entries</a> or external files or <a href=\"https://www.polifab.polimi.it\">webpages</a>.<br />Formatting, links and other useful functions are accessible by mouse right-click while editing the \"Text\" field.<br /><br />Beside <b>Page</b><u>,</u> another data type already provided is <b>Image</b> which allows to display in line an <a href=\"#1f1b286fb53611edb6e0d319a877bc10\">image</a> with the relative caption."
},
"format": "G_Page",
"uid": "05a9c119b50911edb57cd319a877bc10"
},
{
"children": [
"38d51c96ef0611edb856309c23d25aa5"
],
"data": {
"Date": "2023-02-24",
"MetrologyType": "Reflectometry"
},
"format": "M_Generic",
"uid": "083677b1ef0c11edb0eb309c23d25aa5"
},
{
"children": [],
"data": {
"SonicationPower": "70",
"SonicationTemp": "",
"SonicationTime": "5"
},
"format": "L_Sonication",
"uid": "0b93e17fb77111ed8856309c23d25aa5"
},
{
"children": [
"1bbb9d59b51211eda317d319a877bc10",
"833496b1b51311edbf7ad319a877bc10"
],
"data": {
"Date": "2023-02-20",
"Method": "Evaporation"
},
"format": "P_Deposition",
"uid": "0fb1aa19b50d11ed9d56d319a877bc10"
},
{
"children": [],
"data": {
"Caption": "Image",
"Image": "<img src=\"Pictures/Guide/logo.png\" />"
},
"format": "G_Image",
"uid": "0fc0e134b5e311edb13bd319a877bc10"
},
{
"children": [],
"data": {
"Date": "2023-02-24",
"IBEAngle": "30",
"IBECurrent": "50",
"IBEEnergy": "200",
"IBETime": "12"
},
"format": "P_IBE",
"uid": "10340b4bca5111edbdb2309c23d25aa5"
},
{
"children": [
"0b93e17fb77111ed8856309c23d25aa5"
],
"data": {
"Chemical": "DMSO",
"Date": "2023-03-02",
"LiftOffTemperature": "70",
"LiftOffTime": "15"
},
"format": "P_LiftOff",
"uid": "1251bf66b62011ed8e04d319a877bc10"
},
{
"children": [],
"data": {
"BAKMaterial": "ZnS",
"BAKRate": "4",
"BAKThickness": "900.0"
},
"format": "D_BAK640Other",
"uid": "12fcd97ebb8511ed9e06f2121efb8ca4"
},
{
"children": [],
"data": {
"Name": "Processes",
"Text": "<br />A list of default processes is already in this file. Ready to copy entries are in <a href=\"#1c059884b51a11eda830d319a877bc10\">process examples</a><br />First level processes include Lithography, Thermal treatments, Metrology steps, Etch, Depositions... For substeps or large tables of parameters a second level of depth is added in the hierarchy.<br />This can be the example of the parameters of individual al layers in a depostion or of spin coating in a lithographic process.<br />Data Types can be customized according to the need and new ones can be added.<br />"
},
"format": "G_Page",
"uid": "17196345b51411eda80ad319a877bc10"
},
{
"children": [
"2b6c5f0fe43311edac2d309c23d25aa5",
"c84f582fe43711ed9822309c23d25aa5",
"8ff90d41e44411ed90ce309c23d25aa5",
"430619aeea6511edadd3309c23d25aa5",
"766ecdaaea6511ed85ce309c23d25aa5",
"cceb3c07ea6511ed8cee309c23d25aa5"
],
"data": {
"Name": "Collaboration and file sharing"
},
"format": "C_Journal",
"uid": "1747f7fbe43311ed8f48309c23d25aa5"
},
{
"children": [],
"data": {
"Caption": "Child Type Limits for Deposition",
"Image": "<img src=\"Pictures/Guide/Child Type Limits.png\" />"
},
"format": "G_Image",
"uid": "1a812b72b5cb11ed87bed319a877bc10"
},
{
"children": [
"3759ad4abd2f11ed8b85a7ff4e30a158"
],
"data": {
"BAKMaterial": "Al2O3",
"BAKRate": "0.2",
"BAKThickness": "20"
},
"format": "D_BAK640Oxide",
"uid": "1bbb9d59b51211eda317d319a877bc10"
},
{
"children": [
"55069829ca4811edbbcb309c23d25aa5",
"7ebfabebca4811edb08e309c23d25aa5"
],
"data": {
"Date": "2023-02-20",
"Method": "Evaporation"
},
"format": "P_Deposition",
"uid": "1bcf5394ca4811ed87e7309c23d25aa5"
},
{
"children": [
"4e78186fb51a11ed9b0bd319a877bc10",
"d3f3cfe8b55511ed9ed9d319a877bc10",
"d3f3cfe7b55511ed9fedd319a877bc10",
"d3c9b6bdb53b11edb12fd319a877bc10",
"b4e43761fe4811edab29c9d9d15ef1e5",
"c9ac97c0b5e511ed9e78d319a877bc10",
"aa17a3e8cc8c11eda86a309c23d25aa5",
"e0a5236eb53411ed88a9d319a877bc10",
"e0f92f56b68011ed93bb309c23d25aa5",
"1251bf66b62011ed8e04d319a877bc10",
"cad636f0b55911edbe3ed319a877bc10",
"27e70189b51a11ed8d8ed319a877bc10",
"27e7018cb51a11ed9b26d319a877bc10",
"f3b6abe8ba9a11edb49bfe50e5164240"
],
"data": {
"Lasermark": "AAAA",
"Name": "Processes",
"Substrate": "Ceramic"
},
"format": "S_Wafer",
"uid": "1c059884b51a11eda830d319a877bc10"
},
{
"children": [],
"data": {
"Caption": "Hierarchy of samples",
"Image": "<img src=\"Pictures/Guide/samples.png\" />"
},
"format": "G_Image",
"uid": "1f1b286fb53611edb6e0d319a877bc10"
},
{
"children": [],
"data": {
"Tag": "O2 Pressure",
"Unit": "mbar",
"Value": "0.0001"
},
"format": "G_Value",
"uid": "21257592bb8411eda827f2121efb8ca4"
},
{
"children": [
"27e7018bb51a11edbfcbd319a877bc10",
"2f276d1cb60711edb4b6d319a877bc10",
"12fcd97ebb8511ed9e06f2121efb8ca4"
],
"data": {
"Date": "2023-02-20",
"Method": "Evaporation"
},
"format": "P_Deposition",
"uid": "27e70189b51a11ed8d8ed319a877bc10"
},
{
"children": [],
"data": {
"BAKMaterial": "Al",
"BAKRate": "2",
"BAKThickness": "100"
},
"format": "D_BAK640Metal",
"uid": "27e7018bb51a11edbfcbd319a877bc10"
},
{
"children": [
"4b23dc8dc00211edac3087a7ac4da096",
"a02fa8e6bdb011edba50309c23d25aa5",
"78447f09c00211eda19287a7ac4da096"
],
"data": {
"Date": "2023-02-20",
"Method": "Sputtering"
},
"format": "P_Deposition",
"uid": "27e7018cb51a11ed9b26d319a877bc10"
},
{
"children": [],
"data": {
"Name": "A word of caution",
"Text": "As everything in the \"database\" is strored in the treeline file and related files linked with relative paths to it, it could be tempting to just place everything on dropbox/onedrive/gdrive/whatever shared folder and use it just as it is.<br />Although this would generally work, it is a risky approach. Nothing prevents two people to access the files at the same time for modifications. On the above mentioned services this would leave behind some conflicting copies of the file and which afterwards need to be analyzed to see what to keep and what to delete (but at least data should not be lost irreversibly).<br /><br />This is not of course the best approach and this kind of problem is typically avoided using some version control software (CVS) to track files and eventually detect and manage conflicts automatically (or at least guide you in the case of conflicting files). As an added benefit a CVS can be used to revert at any previous point in the history and display a timeline of all the modications done (commited).<br /><br />There are many CVS softwares around, for software developent GIT is surely dominating the scene as of 2023 and could be used with treeline as well. This same guide is hosted on Github and was versioned using GIT.<br />Nevertheless for realistic applications in a lab I strongly suggest to set up Subversion for two main reasons:<br /><br /><br />- Subversion handles binary files (everything non-text) better than git and most likely more than 99% of the database will consist of binary files<br />- Subversion has some easy to use interfaces that allow to use SVN directly from the file manager (tortoiseSVN on windows, Thunar-VCS-plugin on Linux) if not willing to use the terminal"
},
"format": "G_Page",
"uid": "2b6c5f0fe43311edac2d309c23d25aa5"
},
{
"children": [],
"data": {
"Link": "<a href=\"Pictures/Guide/\">Data Folder</a>",
"Name": "Ellipsometry data"
},
"format": "G_File",
"uid": "2d2097b0b5e311edaa64d319a877bc10"
},
{
"children": [
"7f0f2257b50011ed83a5d319a877bc10",
"486de0b5b5e111ed99edd319a877bc10",
"1747f7fbe43311ed8f48309c23d25aa5"
],
"data": {
"Element_Data": "Guides"
},
"format": "C_Journals",
"uid": "2ec29bccb50011eda0b2d319a877bc10"
},
{
"children": [
"21257592bb8411eda827f2121efb8ca4"
],
"data": {
"BAKMaterial": "Al2O3",
"BAKRate": "0.2",
"BAKThickness": "20"
},
"format": "D_BAK640Oxide",
"uid": "2f276d1cb60711edb4b6d319a877bc10"
},
{
"children": [],
"data": {
"Caption": "Cloned process",
"Image": "<img src=\"Pictures/Guide/cloned process.png\" />"
},
"format": "G_Image",
"uid": "2f52c753b81911edb892309c23d25aa5"
},
{
"children": [],
"data": {
"Tag": "Numerical tag",
"Unit": "arb. units",
"Value": "15.0"
},
"format": "G_Value",
"uid": "32fd9ceab74611ed93a2309c23d25aa5"
},
{
"children": [],
"data": {
"Tag": "O2 Pressure",
"Unit": "mbar",
"Value": "0.0001"
},
"format": "G_Value",
"uid": "3759ad4abd2f11ed8b85a7ff4e30a158"
},
{
"children": [],
"data": {
"Caption": "Map",
"Image": "<img src=\"Data/Example Wafer Box/Wafer1/Map.png\" />"
},
"format": "G_Image",
"uid": "38d51c96ef0611edb856309c23d25aa5"
},
{
"children": [],
"data": {},
"format": "L_Flood",
"uid": "3947805cca4811eda692309c23d25aa5"
},
{
"children": [],
"data": {
"Defoc": "0",
"Dose": "240"
},
"format": "L_Exposure",
"uid": "42f5468cb60511eda7fed319a877bc10"
},
{
"children": [],
"data": {
"Caption": "TortoiseSVN shell extension for windows explorer",
"Image": "<img src=\"Pictures/Guide/tortoiseSVN.png\" />"
},
"format": "G_Image",
"uid": "430619aeea6511edadd3309c23d25aa5"
},
{
"children": [
"b123b71fb5c711ed8565d319a877bc10",
"1a812b72b5cb11ed87bed319a877bc10"
],
"data": {
"Name": "Editing Data Structure"
},
"format": "C_Journal",
"uid": "486de0b5b5e111ed99edd319a877bc10"
},
{
"children": [],
"data": {
"Material": "W",
"Z400_Ar": "10",
"Z400_DCBias": "160",
"Z400_Power": "50",
"Z400_Pressure": "0.01",
"Z400_Time": "10"
},
"format": "D_Z400Metal",
"uid": "4b23dc8dc00211edac3087a7ac4da096"
},
{
"children": [
"5a49aa5bb50711ed8c37d319a877bc10",
"888e1f73b5c511ed8981d319a877bc10"
],
"data": {
"Name": "Example Wafer Box"
},
"format": "C_Sample_family",
"uid": "4d5510d1b50711eda501d319a877bc10"
},
{
"children": [
"6de6eb81b60411ed845cd319a877bc10",
"d663133ab60411edbcf4d319a877bc10",
"42f5468cb60511eda7fed319a877bc10",
"d8eaf4bab60511ed90c4d319a877bc10",
"3947805cca4811eda692309c23d25aa5"
],
"data": {
"Date": "2023-02-22",
"Mask": "<a href=\"Data/Masks/resolution_test.gds\">resolution_test.gds</a>"
},
"format": "P_Lithography",
"uid": "4e78186fb51a11ed9b0bd319a877bc10"
},
{
"children": [],
"data": {
"Defoc": "0",
"Dose": "40"
},
"format": "L_Exposure",
"uid": "5394c81eb62111eda1e9d319a877bc10"
},
{
"children": [
"5394ef2eb62111ed848dd319a877bc10",
"5394ef2fb62111ed87dfd319a877bc10",
"5394c81eb62111eda1e9d319a877bc10",
"6217df26ca4711ed960e309c23d25aa5",
"dbddc315ca4711eda2f7309c23d25aa5",
"5394ef30b62111ed9c31d319a877bc10"
],
"data": {
"Date": "2023-02-22",
"Mask": "<a href=\"Data/Masks/resolution_test.gds\">resolution_test.gds</a>"
},
"format": "P_Lithography",
"uid": "5394c81fb62111ed820cd319a877bc10"
},
{
"children": [],
"data": {
"Polymer": "AZ5214E",
"SpinAcceleration": "500.0",
"SpinSpeed": "5000",
"SpinTime": "60"
},
"format": "L_SpinCoating",
"uid": "5394ef2eb62111ed848dd319a877bc10"
},
{
"children": [],
"data": {
"BakeTemp": "110",
"BakeTime": "90"
},
"format": "L_Bake",
"uid": "5394ef2fb62111ed87dfd319a877bc10"
},
{
"children": [],
"data": {
"DevelopmentTime": "45.0"
},
"format": "L_Development",
"uid": "5394ef30b62111ed9c31d319a877bc10"
},
{
"children": [],
"data": {
"Name": "Clones",
"Text": "As it is often the case, a sample can be cut to proceed with a split process on different dices.<br />To handle this in the best way you can have <b>both</b> a copy inside the parent wafer and a <i>clone</i> as a new sample.<br />The recomended procedure is the following as done with examples <a href=\"#888e1f73b5c511ed8981d319a877bc10\">Wafer25</a> and <a href=\"#bc5786a2b51d11edb8c3d319a877bc10\">W25D1</a>.<br /><br /><br />1- Log the <a href=\"#ec106aa7b51c11ed9ed1d319a877bc10\">dicing process</a> performed and define parts name under it<br />2- Clone (Copy and Edit -&gt; Paste cloned child) the dices that go on with processing on the sample familiy where they belong<br /><br />Every modification made to one of the clones and its children will be automatically reflected on the other.<br />Clones appear in both their path in the top bar (a.k.a. breadcrumb view).<br /><br />Batch processes regarding multiple samples at once can be cloned as well in the same way."
},
"format": "G_Page",
"uid": "55032c33b53611ed9445d319a877bc10"
},
{
"children": [],
"data": {
"BAKMaterial": "SiO2",
"BAKRate": "0.5",
"BAKThickness": "100"
},
"format": "D_BAK640Oxide",
"uid": "55069829ca4811edbbcb309c23d25aa5"
},
{
"children": [
"1bcf5394ca4811ed87e7309c23d25aa5",
"bdd0dc65ccae11edaab3309c23d25aa5",
"5394c81fb62111ed820cd319a877bc10",
"10340b4bca5111edbdb2309c23d25aa5",
"083677b1ef0c11edb0eb309c23d25aa5",
"d3f3cfebb55511edbb6fd319a877bc10",
"d92c38c2ba7b11ed93e2fe50e5164240",
"bfad2b40ba7d11ed8afffe50e5164240"
],
"data": {
"Lasermark": "6NC2",
"Name": "Wafer1",
"Substrate": "Prime Si"
},
"format": "S_Wafer",
"uid": "5a49aa5bb50711ed8c37d319a877bc10"
},
{
"children": [],
"data": {
"NoteText": "Generic Note",
"NoteType": "Note"
},
"format": "G_Note",
"uid": "5c0a02d0b5c711eda614d319a877bc10"
},
{
"children": [],
"data": {
"Name": "Files",
"Text": "In the same way of notes, a <u>File</u> node can be attached to any other element. These nodes contain just an external link to a file (or a folder if edited accordingly) in relative or abolute path. The choice of absolute or relative paths should be consistent in all the entries; a relative path is advised if the database and relative files are shared among more people or could be moved to a different path at a later stage."
},
"format": "G_Page",
"uid": "5fb1f315b5e811ed9308d319a877bc10"
},
{
"children": [],
"data": {
"BakeTemp": "115",
"BakeTime": "90"
},
"format": "L_Bake",
"uid": "6217df26ca4711ed960e309c23d25aa5"
},
{
"children": [],
"data": {
"Caption": "Examples of processes collapsed and expanded to show substeps",
"Image": "<img src=\"Pictures/Guide/processes.png\" />"
},
"format": "G_Image",
"uid": "625be4e3b53611ed89a6d319a877bc10"
},
{
"children": [
"e66166b8b74511edbbf8309c23d25aa5",
"2d2097b0b5e311edaa64d319a877bc10"
],
"data": {
"Date": "2023-02-23",
"MetrologyType": "Ellipsometry"
},
"format": "M_Generic",
"uid": "64c7d03bb51e11edb359d319a877bc10"
},
{
"children": [],
"data": {
"Name": "Numerical and boolean tag",
"Text": "A convenient way to add a relevant quantitative information that is not already part of a node is to attach a <u>Numerical tag</u> child to it. In the same way a <u>Boolean tag</u> can store yes/no conditions. These tags can still be then used for filtering or searching samples based on matching conditions. A typical use case is the enormous set of metrology and characterization you may run. Instead of creating one type for each characterization you can use tags to build up a custom metrology entry with the relevant informations stored as child nodes. <br />Of course, if you are going to run always the same characterizations producing consistent outputs, you can define a specific data type as described in <a href=\"#486de0b5b5e111ed99edd319a877bc10\">Editing Data Structure</a> to include it in the first place.<br /><br />Note: numerical tags can accept inputs in scientific notation (e.g. 1e-5) but will immediately convert and display it in decimal notation (i.e. 0.00001). If found necessary, a data type with output in scientific notation can be easily added. Nevertheless, data are always stored as decimal behind the courtains and all conditions on values for searching/filtering the database should be written with decimal notation only."
},
"format": "G_Page",
"uid": "66da5cd1b79611ed9b5cdcc7556f6d82"
},
{
"children": [],
"data": {
"NoteText": "Warning",
"NoteType": "Warning"
},
"format": "G_Note_Warning",
"uid": "6ddae204b5c711ed9d52d319a877bc10"
},
{
"children": [],
"data": {
"Polymer": "AZ5214E",
"SpinAcceleration": "500.0",
"SpinSpeed": "5000",
"SpinTime": "60"
},
"format": "L_SpinCoating",
"uid": "6de6eb81b60411ed845cd319a877bc10"
},
{
"children": [],
"data": {
"NoteText": "Rinse in IPA",
"NoteType": "Note"
},
"format": "G_Note",
"uid": "6f8d072aba7d11ed8758fe50e5164240"
},
{
"children": [],
"data": {
"NoteText": "Success",
"NoteType": "Success"
},
"format": "G_Note_Check",
"uid": "7262f66db5c711edb8d3d319a877bc10"
},
{
"children": [],
"data": {
"Link": "<a href=\"Pictures/\">Folder link example</a>",
"Name": "File (Link)"
},
"format": "G_File",
"uid": "743efddeb5e411edb659d319a877bc10"
},
{
"children": [],
"data": {
"NoteText": "Failure",
"NoteType": "Failure"
},
"format": "G_Note_Cross",
"uid": "74df6fdab5c711eda9d5d319a877bc10"
},
{
"children": [],
"data": {
"Caption": "VCS-plugin for thunar file manager",
"Image": "<img src=\"Pictures/Guide/thunar-vcs-plugin.png\" />"
},
"format": "G_Image",
"uid": "766ecdaaea6511ed85ce309c23d25aa5"
},
{
"children": [],
"data": {
"Material": "Si",
"Z400_Ar": "18",
"Z400_DCBias": "320",
"Z400_O2": "2",
"Z400_Power": "150",
"Z400_Pressure": "0.01",
"Z400_Time": "635"
},
"format": "D_Z400Oxide",
"uid": "78447f09c00211eda19287a7ac4da096"
},
{
"children": [],
"data": {
"BAKMaterial": "NiFe",
"BAKRate": "0.1",
"BAKThickness": "30"
},
"format": "D_BAK640Metal",
"uid": "7ebfabebca4811edb08e309c23d25aa5"
},
{
"children": [
"f5ac0a3ab53b11edb60fd319a877bc10",
"05a9c119b50911edb57cd319a877bc10",
"f8dfa745b51411ed8f24d319a877bc10",
"1f1b286fb53611edb6e0d319a877bc10",
"17196345b51411eda80ad319a877bc10",
"625be4e3b53611ed89a6d319a877bc10",
"f9b8a856b5c611ed8c08d319a877bc10",
"5fb1f315b5e811ed9308d319a877bc10",
"66da5cd1b79611ed9b5cdcc7556f6d82",
"dce13fa0b5e811ed94d9d319a877bc10",
"55032c33b53611ed9445d319a877bc10",
"e4991b20b53611eda947d319a877bc10",
"2f52c753b81911edb892309c23d25aa5"
],
"data": {
"Name": "Basic Usage (click me)"
},
"format": "C_Journal",
"uid": "7f0f2257b50011ed83a5d319a877bc10"
},
{
"children": [],
"data": {
"BAKMaterial": "ZnS",
"BAKRate": "4",
"BAKThickness": "900.0"
},
"format": "D_BAK640Other",
"uid": "833496b1b51311edbf7ad319a877bc10"
},
{
"children": [
"0fb1aa19b50d11ed9d56d319a877bc10",
"ec106aa7b51c11ed9ed1d319a877bc10"
],
"data": {
"Lasermark": "6JL3",
"Name": "Wafer25",
"Substrate": "Prime Si"
},
"format": "S_Wafer",
"uid": "888e1f73b5c511ed8981d319a877bc10"
},
{
"children": [],
"data": {
"Lasermark": "6NC2",
"Name": "Wafer",
"Substrate": "Prime Si",
"Tag": ""
},
"format": "S_Wafer",
"uid": "8e49b104b5e411ed842bd319a877bc10"
},
{
"children": [],
"data": {
"Name": "Use of Subversion",
"Text": "<u>using a text console</u><br /><br />the main commands would be<br /><br />svn checkout - to extract for the first time a repository (run just once to start working on a new device)<br />svn update - to sync the local copy with what is present in the server<br />svn add - to include new files in the version control<br />svn commit - to upload modifications to the central server (and add a text comment of the modifications made)<br /><br />There is probably no need to use branches, but it could be an option as well if you want it.<br /><br /><u>using a graphical interface</u><br /><br />A more immediate approach would be to use a GUI like TortoiseSVN on windows, thunar-VCS-plugin for linux or similar alternatives which could allow for the same operations in an intutive way directly from the file folder via context menus. Some examples in the screenshots below."
},
"format": "G_Page",
"uid": "8ff90d41e44411ed90ce309c23d25aa5"
},
{
"children": [],
"data": {
"AnnealingAthmosphere": "Vacuum",
"AnnealingTemperature": "600",
"AnnealingTime": "60",
"AnnealingType": "RTP",
"Date": "2023-02-23"
},
"format": "P_Annealing",
"uid": "958b5d3eb5c411ed8a13d319a877bc10"
},
{
"children": [],
"data": {
"Name": "Dice",
"Substrate": "Ceramic"
},
"format": "S_Dice",
"uid": "96853b39b5e411ed9b28d319a877bc10"
},
{
"children": [],
"data": {
"Tag": "Uniformity",
"Unit": "%",
"Value": "2.3"
},
"format": "G_Value",
"uid": "96cce035ef0311edae45309c23d25aa5"
},
{
"children": [],
"data": {
"Date": "2023-02-23",
"Images": "<a href=\"Data/Images\">Images</a>",
"MicroscopyType": "Electron"
},
"format": "M_Microscopy",
"uid": "9b11d7c0ba7c11eda582fe50e5164240"
},
{
"children": [],
"data": {
"GalvanicCurrent": "0.1",
"GalvanicMaterial": "Cu",
"GalvanicTemp": "25",
"GalvanicTime": "120",
"GalvanicVoltage": "1.3"
},
"format": "D_Galvanic",
"uid": "9ddf182eb55811edb1b5d319a877bc10"
},
{
"children": [],
"data": {
"Material": "Si",
"Z400_Ar": "20",
"Z400_DCBias": "1805",
"Z400_Power": "147",
"Z400_Pressure": "0.02",
"Z400_Time": "600"
},
"format": "D_Z400Other",
"uid": "a02fa8e6bdb011edba50309c23d25aa5"
},
{
"children": [],
"data": {
"Date": "2023-02-24",
"IBEAngle": "30",
"IBECurrent": "50",
"IBEEnergy": "200",
"IBETime": "12"
},
"format": "P_IBE",
"uid": "aa17a3e8cc8c11eda86a309c23d25aa5"
},
{
"children": [],
"data": {
"Name": "Data Types",
"Text": "The data structure is completely configurable, after you get familiar with the examples, you can modify and/or add data types with Data -&gt; Configure Data Types according to your needs.<br />Please refer to the documentation for more details on Data Types, configuration of fields and outputs. The complete Treeline manual can be found under the Help menu.<br /><br />Some suggestions to maintain consistency in modified databases:<br /><br />1) use Suffix field in the Field confic to specify measurement units. Use a leading white space where appropriate (e.g. \" kV\") to have the expected output.<br /><br />2) Icons if possible should keep<br /><br /><b>+</b> for additive process<br /><b>-</b> for removal process<br /><br /><span style=\"color:#0000ff\">Blue</span> = metals<br /><span style=\"color:#ff0000\">Red</span> = oxides<br /><span style=\"color:#005500\">Green</span> = semiconductors/nitrides/sulfides/others<br /><br />3) The Data type should follow a naming like<br /><br />X_NameOfNewType<br /><br />where X:<br /><br />C: Container (Journals, Samples)<br />S: Sample (Wafer,Dice)<br />G: Generic (Page, Image, Note, File) <br /><br />First level process:<br />P: Process<br />M: Metrology<br /><br />Second level process:<br />D for Deposition<br />L for Lithography<br />E for Etch<br />...<br /><br /><b>Important:</b> Even though treeline does not really force any strong restriction, it is a good practice to set legitimate Child Type Limits (in Type config, under advanced options). For example if you create a new process you will have to add it as legitimate for Wafers and/or Dices. See image below.<br /><br />"
},
"format": "G_Page",
"uid": "b123b71fb5c711ed8565d319a877bc10"
},
{
"children": [
"4d5510d1b50711eda501d319a877bc10",
"d27566dfb55511ed85e9d319a877bc10",
"e97484dbb51e11eda061d319a877bc10"
],
"data": {
"Name": "Examples"
},
"format": "C_Samples",
"uid": "b4026def878b11edb00fc7f3b7147ef6"
},
{
"children": [],
"data": {
"Date": "2023-05-29",
"Pressure": "12"
},
"format": "P_HighPressureCleaning",
"uid": "b4e43761fe4811edab29c9d9d15ef1e5"
},
{
"children": [
"958b5d3eb5c411ed8a13d319a877bc10",
"64c7d03bb51e11edb359d319a877bc10"
],
"data": {
"Name": "W25D1",
"Substrate": "Prime Si"
},
"format": "S_Dice",
"uid": "bc5786a2b51d11edb8c3d319a877bc10"
},
{
"children": [],
"data": {
"SonicationPower": "70",
"SonicationTemp": "21",
"SonicationTime": "1"
},
"format": "L_Sonication",
"uid": "bd352fe2ba7f11edbde3fe50e5164240"
},
{
"children": [
"cc8358f6ccae11eda863309c23d25aa5",
"96cce035ef0311edae45309c23d25aa5"
],
"data": {
"Date": "2023-02-20",
"MetrologyType": "Resistivity"
},
"format": "M_Generic",
"uid": "bdd0dc65ccae11edaab3309c23d25aa5"
},
{
"children": [],
"data": {
"Date": "2023-03-02",
"Images": "<a href=\"Data/Example Wafer Box/Wafer1/Images/\">Images</a>",
"MicroscopyType": "Optical"
},
"format": "M_Microscopy",
"uid": "bfad2b40ba7d11ed8afffe50e5164240"
},
{
"children": [],
"data": {
"Name": "Set up of of subversion",
"Text": "Subversion (svn) uses a master <b>repository</b> somewhere (a server accessible over internet or local network), all the people working on it have their own local copy (a <b>checkout</b> of the repository) that they can synchronize (<b>update</b>), work upon normally, and send back the modifications (<b>commit</b>).<br /><br />The first important decision is where to host the server.<br /><br /><u>On local network</u><br />you can just use any PC accessible via LAN. Just install svn and follow the documentation to create a repository with few commands.<br /><br /><u>On the internet</u><br /><br />a) use a third party hosting service. There could be several options, also for free but typically with a limited space (e.g. <a href=\"https://www.perforce.com/hth/svn-hosting\">https://www.perforce.com/hth/svn-hosting</a>, <a href=\"https://riouxsvn.com\">https://riouxsvn.com</a>, <a href=\"https://sliksvn.com/\">https://sliksvn.com/</a> and others) but with the possibility for paid upgrades. This is the easiest way to start.<br /><br />b) host yourself a svn server with public IP address, you can use svn by itself or use some nicer web-based control panels for it, for example <a href=\"https://scm-manager.org\">scm-manager</a>. Be aware when going for self-hosting of all the security best practices needed to maintain a service publicly accessible through the internet, also it is quite paramount to secure connection with https so you will need to have a domain name or DDNS. Hardware requirements are low that the most basic VPS could work for it. It could be remotely possible that your IT department might be willing to help and set it up for you.<br /><br />Whatever the solution, it is always important to have periodic backups of the repository. Remember, however, that even in the worst case scenario most users would have a complete and recent local copy of all the files on their devices. Your material is always with you and even if server and backups both fail you mostly lose the \"history\" of the database but not its contents. <br /><br />Once the server is set, use svn on a personal device to checkout the empty repository, add the files and proceed to the first commit!<br />"
},
"format": "G_Page",
"uid": "c84f582fe43711ed9822309c23d25aa5"
},
{
"children": [],
"data": {
"Date": "2023-02-23",
"MicroscopyType": "Optical"
},
"format": "M_Microscopy",
"uid": "c9ac97c0b5e511ed9e78d319a877bc10"
},
{
"children": [
"9ddf182eb55811edb1b5d319a877bc10"
],
"data": {
"Date": "2023-02-22",
"Method": "Electroplating"
},
"format": "P_Deposition",
"uid": "cad636f0b55911edbe3ed319a877bc10"
},
{
"children": [],
"data": {
"Tag": "Sheet resistance",
"Unit": "mOhm/sq",
"Value": "12"
},
"format": "G_Value",
"uid": "cc8358f6ccae11eda863309c23d25aa5"
},
{
"children": [],
"data": {
"Caption": "Commiting (and adding new files) with tortoiseSVN",
"Image": "<img src=\"Pictures/Guide/commiting.png\" />"
},
"format": "G_Image",
"uid": "cceb3c07ea6511ed8cee309c23d25aa5"
},
{
"children": [
"bc5786a2b51d11edb8c3d319a877bc10",
"e4329a51b51d11ed86b9d319a877bc10"
],
"data": {
"Name": "Example Dice Tray"
},
"format": "C_Sample_family",
"uid": "d27566dfb55511ed85e9d319a877bc10"
},
{
"children": [],
"data": {
"Date": "2023-02-23",
"DicingType": "Automatic"
},
"format": "P_Dicing",
"uid": "d3c9b6bdb53b11edb12fd319a877bc10"
},
{
"children": [],
"data": {
"AnnealingAthmosphere": "Vacuum",
"AnnealingTemperature": "600",
"AnnealingTime": "1",
"AnnealingType": "RTP",
"Date": "2023-02-23"
},
"format": "P_Annealing",
"uid": "d3f3cfe7b55511ed9fedd319a877bc10"
},
{
"children": [
"f476de1ebb8111ed8690f2121efb8ca4",
"f476de1dbb8111edaa13f2121efb8ca4"
],
"data": {
"Date": "2023-02-22",
"MetrologyType": "Metrology (generic)"
},
"format": "M_Generic",
"uid": "d3f3cfe8b55511ed9ed9d319a877bc10"
},
{
"children": [
"f357ffbbb5c011edb900d319a877bc10"
],
"data": {
"Chemical": "BOE",
"Date": "2023-02-28",
"WetEtchTemperature": "21",
"WetEtchTime": "2"
},
"format": "P_WetEtch",
"uid": "d3f3cfebb55511edbb6fd319a877bc10"
},
{
"children": [],
"data": {
"BakeTemp": "110",
"BakeTime": "90"
},
"format": "L_Bake",
"uid": "d663133ab60411edbcf4d319a877bc10"
},
{
"children": [
"e60d464eb5e211ed97aed319a877bc10",
"04d5ade0b5e311edb62fd319a877bc10",
"0fc0e134b5e311edb13bd319a877bc10",
"743efddeb5e411edb659d319a877bc10",
"32fd9ceab74611ed93a2309c23d25aa5",
"ea7616ddb77011ed8f90309c23d25aa5"
],
"data": {
"Name": "Generic"
},
"format": "S_Wafer",
"uid": "d865efafb5e211ed8d37d319a877bc10"
},
{
"children": [
"bd352fe2ba7f11edbde3fe50e5164240"
],
"data": {
"DevelopmentTime": "45"
},
"format": "L_Development",
"uid": "d8eaf4bab60511ed90c4d319a877bc10"
},
{
"children": [],
"data": {
"SonicationPower": "70",
"SonicationTemp": "",
"SonicationTime": "5"
},
"format": "L_Sonication",
"uid": "d92c38c1ba7b11ed813afe50e5164240"
},
{
"children": [
"d92c38c1ba7b11ed813afe50e5164240",
"6f8d072aba7d11ed8758fe50e5164240"
],
"data": {
"Chemical": "AZ100 Remover ",
"Date": "2023-03-02",
"LiftOffTemperature": "50",
"LiftOffTime": "15"
},
"format": "P_LiftOff",
"uid": "d92c38c2ba7b11ed93e2fe50e5164240"
},
{
"children": [],
"data": {},
"format": "L_Flood",
"uid": "dbddc315ca4711eda2f7309c23d25aa5"
},
{
"children": [],
"data": {
"Caption": "Files and tags on a metrology step",
"Image": "<img src=\"Pictures/Guide/files.png\" />"
},
"format": "G_Image",
"uid": "dce13fa0b5e811ed94d9d319a877bc10"
},
{
"children": [],
"data": {
"Chemical": "Chemical",
"Date": "2023-02-28",
"WetEtchTemperature": "21",
"WetEtchTime": "2"
},
"format": "P_WetEtch",
"uid": "e0a5236eb53411ed88a9d319a877bc10"
},
{
"children": [],
"data": {
"Date": "2023-03-01",
"PlasmaGas": "O2",
"PlasmaPower": "150",
"PlasmaPressure": "0.5",
"PlasmaTime": "1"
},
"format": "P_Plasma",
"uid": "e0f92f56b68011ed93bb309c23d25aa5"
},
{
"children": [
"9b11d7c0ba7c11eda582fe50e5164240"
],
"data": {
"Name": "W25D2",
"Substrate": "Prime Si",
"Tag": "Disposed"
},
"format": "S_Dice",
"uid": "e4329a51b51d11ed86b9d319a877bc10"
},
{
"children": [],
"data": {
"Caption": "Cloned dices",
"Image": "<img src=\"Pictures/Guide/clones.png\" />"
},
"format": "G_Image",
"uid": "e4991b20b53611eda947d319a877bc10"
},
{
"children": [],
"data": {
"NoteText": "Note",
"NoteType": "Note"
},
"format": "G_Note",
"uid": "e60d464eb5e211ed97aed319a877bc10"
},
{
"children": [],
"data": {
"Tag": "Thickness",
"Unit": "nm",
"Value": "941.0"
},
"format": "G_Value",
"uid": "e66166b8b74511edbbf8309c23d25aa5"
},
{
"children": [
"8e49b104b5e411ed842bd319a877bc10",
"96853b39b5e411ed9b28d319a877bc10",
"1c059884b51a11eda830d319a877bc10",
"d865efafb5e211ed8d37d319a877bc10"
],
"data": {
"Name": "Presets"
},
"format": "C_Sample_family",
"uid": "e97484dbb51e11eda061d319a877bc10"
},
{
"children": [],
"data": {
"Boolean": "True",
"Tag": "Boolean tag"
},
"format": "G_Boolean",
"uid": "ea7616ddb77011ed8f90309c23d25aa5"
},
{
"children": [
"bc5786a2b51d11edb8c3d319a877bc10",
"e4329a51b51d11ed86b9d319a877bc10"
],
"data": {
"Date": "2023-02-23",
"DicingType": "Manual"
},
"format": "P_Dicing",
"uid": "ec106aa7b51c11ed9ed1d319a877bc10"
},
{
"children": [],
"data": {
"NoteText": "Damaged by etching",
"NoteType": "Warning"
},
"format": "G_Note_Warning",
"uid": "f357ffbbb5c011edb900d319a877bc10"
},
{
"children": [
"fd1f1758ba9a11ed9d66fe50e5164240",
"fd1f1759ba9a11eda1d5fe50e5164240"
],
"data": {
"Date": "2023-03-04",
"Method": "Spin Coating"
},
"format": "P_Deposition",
"uid": "f3b6abe8ba9a11edb49bfe50e5164240"
},
{
"children": [],
"data": {
"Tag": "Numerical tag",
"Unit": "arb. units",
"Value": "333.3"
},
"format": "G_Value",
"uid": "f476de1dbb8111edaa13f2121efb8ca4"
},
{
"children": [],
"data": {
"Link": "<a href=\"Pictures/\">Folder link example</a>",
"Name": "File (Link)"
},
"format": "G_File",
"uid": "f476de1ebb8111ed8690f2121efb8ca4"
},
{
"children": [],
"data": {
"Name": "General informations",
"Text": "The database is structured as a tree to allow complete flexibility in the types of process flows that can be logged.<br />Each entry is called a <b>Node</b> and to each Node is associated a <b>Type</b>. Nodes can be freely moved up and down or across the tree hierarchy to represent correctly the flow of operations.<br />Each type contains specific <b>fields</b> which may be the parameters of a process, links to images or external files, a block of text like the one you are reading, and almost any conceivable form of data you may want to save.<br />Nodes can be copied and pasted allowing to quickly replicate a previous entry with only some minor modifications (e.g. changing just one parameter between two otherwise identical experiments)<br /><br />To edit fields, use the <i>Data Edit</i> tab on the bottom of this screen, to see properly formatted <b>output</b> use instead the <i>Data Output</i> tab.<br /><br />Several customizations and options can be found under the <u>Tools</u> menu. For instance you may be wanting to set the European date format in <i>General Options</i> as %d/%m/%y.<br />This template is typically intended to be used with <i>Show Output Descendants</i> enabled under the <u>View</u> menu or on the menu bar.<br /><br />Finally, in case of IP concerns, the file can be password protected from File -&gt; Properties"
},
"format": "G_Page",
"uid": "f5ac0a3ab53b11edb60fd319a877bc10"
},
{
"children": [],
"data": {
"Name": "Samples",
"Text": "You can organize samples in different sample families. According to the needs, a sample familily can be the container of all the samples of a project or represent a physical storage box.<br />Samples can be either <a href=\"#5a49aa5bb50711ed8c37d319a877bc10\">wafers</a> or <a href=\"#a81fb188b51011eda053d319a877bc10\">pieces</a> (dices) Each sample will then continue any number of processes ordered chronologically."
},
"format": "G_Page",
"uid": "f8dfa745b51411ed8f24d319a877bc10"
},
{
"children": [
"5c0a02d0b5c711eda614d319a877bc10",
"7262f66db5c711edb8d3d319a877bc10",
"6ddae204b5c711ed9d52d319a877bc10",
"74df6fdab5c711eda9d5d319a877bc10"
],
"data": {
"Name": "Notes",
"Text": "As in the image above, notes can be attached everywhere (processes, samples, containers...) like sticky notes. With the relevant difference that sticky notes are not cleanroom compatible.<br />The field \"NoteType\" allows you to give a visual feeback of what the note contains both in the output color and icons."
},
"format": "G_Page",
"uid": "f9b8a856b5c611ed8c08d319a877bc10"
},
{
"children": [],
"data": {
"Polymer": "PMMA 200K",
"SpinAcceleration": "500.0",
"SpinSpeed": "5000",
"SpinTime": "60"
},
"format": "L_SpinCoating",
"uid": "fd1f1758ba9a11ed9d66fe50e5164240"
},
{
"children": [],
"data": {
"BakeTemp": "150",
"BakeTime": "90"
},
"format": "L_Bake",
"uid": "fd1f1759ba9a11eda1d5fe50e5164240"
}
],
"properties": {
"tlversion": "3.1.5",
"topnodes": [
"2ec29bccb50011eda0b2d319a877bc10",
"b4026def878b11edb00fc7f3b7147ef6"
],
"zeroblanks": false
}
}