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GPU Accelerated OPC

Optical Proximity Correction (OPC) is a photolithography technique that modifies photomask geometry to counteract diffraction and process effects, ensuring accurate printing of patterns on the wafer. This work demonstrates a proof of concept showing how using a GPU-based approach can significantly speed up these modifications compared to a CPU.

Presentation Link: https://tinyurl.com/3zzvc3pt

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Optical Proximity Correction (OPC) is a photolithography technique that modifies photomask geometry to counteract diffraction and process effects, ensuring accurate printing of patterns on the wafer. This work demonstrates a proof of concept showing how using a GPU-based approach can significantly speed up these modifications compared to a CPU.

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